Effect of Proton Irradiation on Zr/Nb Nanoscale Multilayer Structure and Properties

The effect of proton irradiation on the structure, phase composition, defect state and nanohardness Zr/Nb nanoscale multilayer coatings was investigated. Preservation layered structure with 50 100 nm thick layers, observed after protons at 1720 keV energy 3.4 × 1015, 8.6 1015 1016 ions/cm2 fluences, interfaces remained incoherent. In individual layer thicknesses 10 25 nm, there were insignificant fluctuations in interplanar distance, which influenced by changes fluence, partially destroyed became semicoherent. Changing fluence investigated ranges led to a decrease 10–50 nm. Variable-energy positron Doppler broadening analysis revealed that these are primarily caused peculiarities localization accumulation embedded ions do not cause significant increase S-parameters thickness less than